Examples of 'load lock' in a sentence
Meaning of "load lock"
load lock: A load lock is a chamber used in semiconductor manufacturing processes to transfer samples or wafers between environments without exposing them to contaminants
How to use "load lock" in a sentence
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load lock
Then the load lock was evacuated with the substrate loaded therein.
The substrate was then taken out from the load lock chamber.
Then the load lock is evacuated with the plastic tube loaded therein.
As a result, the transport pod becomes a movable load lock.
The load lock is vented to atmosphere while the chamber is maintained under high vacuum.
Safety valve prevents overload, load lock or any failure due to hydraulic fluid loss.
The load lock was vented to atmosphere while the chamber was maintained under high vacuum.
Processing is commenced once the load lock valve 15 is again closed.
Lift load lock out when lifting materials, the electronics are switched off.
A substrate to be coated is first loaded into the load lock compartment 27 with valve 31 closed.
Transfer door for load lock chambers . For applications under atmospheric pressure.
SC 1b has unloaded the untreated substrate to load lock 5.
After venting the load lock and cooling cassette 17, the last substrate is also cooled.
Multiple wafers are conveniently moved through the load lock chamber 43 at one time on a carrier 45.
SC 1a has been loaded with a treated substrate from load lock 5.
See also
SC1b is loaded from load lock 5 by a treated substrate.
Figures 4E-G particularly show the production dimensions of a preferred load lock assembly 414.
SC1a is loaded from load lock 5 with a treated substrate.
The cover 31 operates as a gate valve of the load lock chamber 43 to the outside.
Another load lock valve 15 is provided for opening the chamber 11 into a processing chamber 17.
