Examples of 'microelectromechanical system' in a sentence
Meaning of "microelectromechanical system"
microelectromechanical system - a technology that combines electrical and mechanical components at a very small scale, typically used in various sensors and devices
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- an electromechanical system composed of micron-sized components (of the range 1μm–100μm) in a millimetre-sized system (of the range 0.02mm–1mm)
How to use "microelectromechanical system" in a sentence
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microelectromechanical system
The microelectromechanical system can be a piezoelectric transducer.
Microelectronic and microelectromechanical system.
The microelectromechanical system is then deactuated.
The resonator may be a laterally vibrating microelectromechanical system composite resonator.
The microelectromechanical system is then in the actuated state.
The present invention concerns in particular an accelerometer in the form of a microelectromechanical system.
Microelectromechanical system able to switch between two stable positions.
The invention also relates to a process for fabricating a microelectromechanical system according to the invention.
Microelectromechanical system technology.
It can then comprise a microelectromechanical system or MEMS.
The microelectromechanical system can include a movable membrane including such membrane of amorphous carbon.
The method of claim 3 wherein said instrument is incorporated into a microelectromechanical system.
The microelectromechanical system thus formed is a MEMS chip.
The device for detecting according to claim 1, being a microelectromechanical system and / or a nanoelectromechanical system.
The microelectromechanical system can be an actuator or a sensor ;.
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For example, the object imaged by the imaging process is a microelectromechanical system or a nanoelectromechanical system.
The microelectromechanical system can be a capacitive transducer ;.
Such a method makes low-cost inspection of the solder joints of the microelectromechanical system assembly possible.
The microelectromechanical system 1 is a capacitive transducer.
Said pressure sensor could be a microelectromechanical system ( MEMS ) pressure sensor.
This microelectromechanical system 1 is a capacitive transducer.
FIG . 4A is typical graphic view of the transfer function of a microelectromechanical system.
Microelectromechanical system comprising an assembly of a plurality of layers stacked in a stacking direction comprising,.
Scanning device comprising at least one microelectromechanical system mirror, referred to as a MEMS mirror.
The microelectromechanical system according to claim 9, wherein the polygon has more than four sides.
Helium has a negative impact on the microelectromechanical system ( MEMS ) oscillators of the smartphone.
The microelectromechanical system according to claim 1, wherein the mechanical decoupling structure comprises,.
For example, the system may comprise a microelectromechanical system or MEMS sensor, such as a gyrometer.
The microelectromechanical system according to claim 1, wherein the thickness is between 3 nm and 20 nm.
FIG . 3 schematically shows a cross-sectional view of a microelectromechanical system or MEMS chip according to the invention.
Microelectromechanical system ( MEMS ) comprising,.
The ready-to-market prototype includes high-performance microelectromechanical system sensors, including an accelerometer and gyroscopes.
FIG . 2 represents a microelectromechanical system according to another embodiment of the invention.
In several embodiments, the substrates herein are fabricated as a microelectromechanical system ( MEMS ).
This embodiment enables a microelectromechanical system to be made with a very flexible movable membrane ;.
Device according to claim 1, in which the system comprises a microelectromechanical system ( MEMS ).
An illustrative example of a microelectromechanical system according to the invention is shown schematically in FIG . 3.
DETAILED DESCRIPTION Figure 1 is a block diagram illustrating a laterally vibrating microelectromechanical system ( MEMS ) composite resonator 104.
Mechanical elements in microelectromechanical system (MEMS) structures require releasing in order to function correctly.
Figure 4 is a flow diagram of a method 400 for generating a laterally vibrating microelectromechanical system ( MEMS ) composite resonator 104.
FIG . 1 represents a microelectromechanical system 1 according to an embodiment of the invention.
These aims are achieved in particular by a microelectromechanical system ( MEMS ) comprising,.
FIG . 8 illustrates a microelectromechanical system of accelerometer type using two devices D, D ′ of the type of FIG . 3 b.
Preferably, the pump is a microelectromechanical system ( MEMS ) pump.
It's mems -- microelectromechanical system technology.
FIG . 3 represents another embodiment in which the microelectromechanical system 1 is a piezoelectric transducer.
The present invention concerns a microelectromechanical system ( MEMS, Micro Electro Mechanical System ).
FIG . 1 ( a ) is a diagram in vertical section of a microelectromechanical system in a first stable position ;.
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